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    Please use this identifier to cite or link to this item: http://ccur.lib.ccu.edu.tw/handle/A095B0000Q/279


    Title: 線性軸六自由度幾何誤差量測系統之設計與驗證;Design and verification of six degree-of-freedom geometric errors measurement system for linear axis
    Authors: 羅詠泰;LUO, YONG-TAI
    Contributors: 機械工程系研究所
    Keywords: 誤差量測;Error measurement
    Date: 2017
    Issue Date: 2019-07-17
    Publisher: 機械工程系研究所
    Abstract: 目前用於線性軸的幾何誤差量測技術中,市面上多朝向能同時量測多個自由度誤差為目標開發新的量測系統,較常見的工具機誤差量測系統為雷射干涉儀,但其單次架設只能對單一幾何誤差做量測,如此要量測多個自由度誤差所耗費的時間過長,而最新市面上可同時量測長行程線性軸多自由度誤差的系統其價格也都非常昂貴,無法為一般人所使用,為改善此現況,本論文設計了一能同時量測長行程線性軸多個自由度誤差的量測系統,以期能達到降低系統的製作成本與同時量測多個幾何誤差的功效。整體量測架構在幾何光學的基礎上,結合雷射干涉儀與特殊的透鏡組,利用反射次數調整和透鏡焦距不同的特性建立多條提升光束偏擺光路於此量測系統,其組成包含一干涉儀雷射源、干涉儀定位鏡組、一個反射鏡、兩個分光鏡、兩個五角稜鏡、一個角隅稜鏡與八個雙凸透鏡和三個二維位置感測器。文中將以Zemax光學模擬軟體與Matlab數學軟體對此量測系統進行模擬結構與數學模型兩方面的分析,再實際建立此量測系統對線性軸做量測,並將結果與雷射干涉儀進行比對,驗證此量測系統實際應用於線性軸誤差量測之效果。
    In this paper, a new kind of non-contact optical measurement system for six-degree-of freedom error measurement of linear axis of machine tools was presented. The measurement system can simultaneously measure six-degree-of freedom error and has low cost advantage, and the commercial parts of optical measurement instruments can only measure one error with one set up and it’s expensive. The proposed measurement system is constituted of a laser sources, three two-dimensional position sensitive detectors, one planar mirrors, two beamsplitters, eight lens, two penta prisms and a corner cube. For applying the basic physical optics theory and methods of skew-ray tracing to the principle of measurement, the measurement system model was implemented by using the ZEMAX optical design software and matlab software to established the architecture of the system.To implement the system, we will verify the feasibility of the proposed system with qualitative and quantitative analysis respectively. The qualitative analysis is to observe the characteristics and trends of the system, and the quantitative analysis is using the skew ray-tracing method to derive the actual laser light transfer within the proposed measurement system. After finish those analysis, we will erect the measurement system, and compare the performance of this system with a laser interferometer.
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