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    Please use this identifier to cite or link to this item: http://ccur.lib.ccu.edu.tw/handle/A095B0000Q/256


    Title: 量測透明基板厚度及折射率的光學系統之設計;Design of optical system for measuring thickness and refractive index of transparent plate
    Authors: 王澤彥;WANG, ZE-YAN
    Contributors: 機械工程系研究所
    Keywords: 量測系統;透明基板;三角測距;measuring system;transparent plate;triangulation
    Date: 2017
    Issue Date: 2019-07-17
    Publisher: 機械工程系研究所
    Abstract: 本論文提出一個新穎且用於同時量測透明基層板的厚度與折射率之非接觸式光學量測系統。量測系統架構由一高品質雷測源入射至一雙折射晶體後形成兩不同極性之平行光,皆經過兩分光鏡與一個三膠合透鏡聚焦,緊接穿透待測物至一反射鏡,並沿原路徑至一偏極分光鏡分為兩光路由兩組膠合透鏡與感測器所組成。所提出之量測系統因雷射光穿透待測物,受其厚度及折射率影響,造成感測器上的光點重心位置產生變化,再透過兩光路不同的變化量求得其參數(折射率n、厚度d),與許多利用干涉與色散之量測系統相比具有更簡單的架構且可量測範圍較大…等優勢。為了證明此系統之可行性,即將此架構建於光學模擬軟體-ZEMAX,來觀察其系統初步特性與定性上之分析,緊接著使用歪斜光斜追蹤法來推導雷射光線在量測系統內之實際光線傳遞情形,即以數學推導的方式為本量測系統進行定量上之分析。接著將所提出之量測系統實際架設於光學桌上進行量測並與市售光學量測儀器相比較,先以實際量測的結果與上述模擬和數學推導的結果進行比對來確認其可行性,最後將本系統與商用儀器之量測結果做數據分析以及比較,在量測材料為BK7與厚度2(mm)之結果在厚度方面最大誤差為0.019%,在折射率方面最大誤差為0.007%。
    In this thesis, we design a novel optical system for simultaneously measuring the thickness and the refractive index of a transparent plate with two optical paths. In the structure of the proposed optical system, the light beam emitted from a laser light source passes through a mounted calcite beam displacer, which split laser into two separate polarizing light beams. The two light beams are then passed through two beam splitters (BSs), a triplet achromatic lens, and a transparent sample, and incident on a first reflective mirror surface. The two light beams reflect into a polarizing beam splitter (PBS) and separate into two optical paths to two CCDs, respectively. The centroids of laser spots on the sensors would change when the thickness d or refractive index n of sample is changed. To determine the measurement of the thickness and the refractive index of the transparent sample, the two optical paths are combined using a self-written signal processing algorithm in order to achieve a rapid measuring capability and a high measuring accuracy. The proposed optical system is based on astigmatic methods with a simpler structure and lower cost.Also, we verify the feasibility of the proposed optical system with qualitative and quantitative analysis respectively. In the qualitative analysis, the architecture of the proposed optical system is established in the optical simulation software ZEMAX to observe the characteristics of the proposed optical system. In the quantitative analysis, to accurately and efficiently analyze the relation between light spot position information and the individual thickness d and the refractive index n, the laser beam progression in the proposed optical system is tracked using a homogeneous coordinate transformation matrix and the skew-ray tracing method. Finally, the validity of the proposed optical system was verified by means of a laboratory-built prototype compareing with the commercial instrument, the measured errors of the thickness d and the refractive index n for the proposed optical system are less than 0.019% and 0.007%, respectively, with the transparent plant (thickness of 2 mm).
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