非真空高分子曲狀光波導式生物感測器;Development of vacuum-less polymer curved optical waveguide biosensors

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Title:	非真空高分子曲狀光波導式生物感測器;Development of vacuum-less polymer curved optical waveguide biosensors
Authors:	劉奕辰;LIU, I-CHEN
Contributors:	機械工程系研究所
Keywords:	波導彎曲損耗;端面入射;SU-8波導;waveguide bending loss;edge incidence;SU-8 waveguide
Date:	2017
Issue Date:	2019-07-17
Publisher:	機械工程系研究所
Abstract:	本論文以SU-8高分子作為波導材料，開發出具有錐狀及彎曲波導之低成本生物感測器及其量測系統，此感測器的特點為利用波導之彎曲能量損失作為量測機制，不但製程簡單，具有不錯的折射率解析度，且感測器具有快速檢測及免標定的特點，未來能與表面電漿共振(SPR)或粒子電漿共振(PPR)等機機制作結合，進一步提升感測器性能。本研究首先探討彎曲波導之結構對感測器靈敏度之影響，我們以有限元素法模擬感測系統對感測器的錐狀波導、彎曲波導、波導尺寸及光場分佈，探討影響感測器性能之因素，從結果可發現當波導尺寸在微米等級的情況下，降低波導寬度及厚度提升使感測器性能，且得知當待測物折射率提升時所量測到之光強度會下降，這個趨勢和金薄膜或金奈米粒子在平面波導上之效應相同，代表將此感測器與其他化學效應進行整合來提升感測器性能是可行的。本研究的第二項重點為以SU-8光阻作為波導結構之製程，我們以市售玻璃載玻片作為基板，並利用黃光微影製程將SU-8光阻製作在基板上作為波導，全程不需經過真空製程，不但降低感測器生產成本，生產效率亦能提升2至3倍，且製作出之感測器能達到5.66×?10?^(-4)的折射率解析度。 This study uses SU-8 polymer as a waveguide material to develop a low-cost biosensor and measurement system with taper and curved waveguide structures. This sensor uses waveguide bending loss as a mechanism for measurement. This process is simple and has a good refractive index resolution. The sensor has a high detection speed without requiring calibration. It can also be combined with features such as surface plasmon resonance, particle plasmon resonance, or other similar mechanisms to further improve sensor performance. This study first investigated the effects of curved waveguide structures on sensor sensitivity. Finite element analysis was used to investigate the effects of taper waveguides, curved waveguides, waveguide dimensions, and optical field distribution on sensor performance. The results show that when the waveguide dimensions are in the micron range, the waveguide’s width and thickness are reduced, hence increasing sensor performance. Moreover, when the refractive index of the subject of measurement increases, the measured light intensity decreases. This effect is similar to that observed using gold film or gold nanoparticles on planar waveguides, which means that combining the sensor with other chemical effects to improve sensor performance is possible. Next, in this study, we used SU-8 photoresists as the structures for producing waveguides. We used commercially available glass as a substrate and photolithography to place the SU-8 photoresists onto the substrate to act as waveguides. Because the process did not require a vacuum, the production cost of the sensor decreased and the production efficiency increased by 2–3 folds. Moreover, the sensors produced had a refractive index resolution of up to 5.66 × 10?4.
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